Inventor
HUBBARD ALEX RICHARD
US6 patents
Patents
6 patentsUS10545409B1Jan 28, 2020
Dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay
IBM3 citations70
US11067896B2Jul 20, 2021
Dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay
IBM0 citations59
US11947712B2Apr 2, 2024
Secure identification of wafer and chip
IBM0 citations58
US12550671B2Feb 10, 2026
Pixelated chuck for retaining warped semiconductor wafers
IBM0 citations57
US11182722B2Nov 23, 2021
Cognitive system for automatic risk assessment, solution identification, and action enablement
IBM0 citations50
US12254992B2Mar 18, 2025
Contact tracing utilizing device signatures captured during transactions
IBM0 citations47