Inventor

USUI HIROO

2 patents

Patents

2 patents

US4394191AJul 19, 1983

Stacked polycrystalline silicon film of high and low conductivity layers

HITACHI LTD33 citations92

US4016007AApr 5, 1977

Method for fabricating a silicon device utilizing ion-implantation and selective oxidation

HITACHI LTD31 citations80