Inventor
SAKAMIZU TOSHIO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SAKAMIZU TOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS6319649B1Nov 20, 2001
Photosensitive resin composition and method of forming resist images
HITACHI LTD31 citations92
US5350485ASep 27, 1994
High-resolution lithography and semiconductor device manufacturing method
HITACHI LTD30 citations92
US5324550AJun 28, 1994
Pattern forming method
HITACHI LTD21 citations92
US7642145B2Jan 5, 2010
Method for producing electronic device
HITACHI LTD7 citations73