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Inventor
HIRAGA TOSHITAKA
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “HIRAGA TOSHITAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EKC TECHNOLOGY K K
2 patents
US7250391B2
Jul 31, 2007
Cleaning composition for removing resists and method of manufacturing semiconductor device
EKC TECHNOLOGY K K
56 citations
93
US7087563B2
Aug 8, 2006
Resist stripping composition and method of producing semiconductor device using the same
EKC TECHNOLOGY K K
9 citations
69
EKC TECHNOLOGY INC
2 patents
US7399365B2
Jul 15, 2008
Aqueous fluoride compositions for cleaning semiconductor devices
EKC TECHNOLOGY INC
35 citations
92
US7718590B2
May 18, 2010
Method to remove resist, etch residue, and copper oxide from substrates having copper and low-k dielectric material
EKC TECHNOLOGY INC
19 citations
82
SONY CORP
1 patent
US7341827B2
Mar 11, 2008
Separation-material composition for photo-resist and manufacturing method of semiconductor device
SONY CORP
0 citations
39