Inventor
BOWEN HEATHER REGINA
US13 patents
⚠️ This page may combine multiple inventors who share the name “BOWEN HEATHER REGINA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR PROD & CHEM
9 patentsUS8993072B2Mar 31, 2015
Halogenated organoaminosilane precursors and methods for depositing films comprising same
AIR PROD & CHEM285 citations98
US8940648B2Jan 27, 2015
Process for producing silicon and oxide films from organoaminosilane precursors
AIR PROD & CHEM28 citations94
US9243324B2Jan 26, 2016
Methods of forming non-oxygen containing silicon-based films
AIR PROD & CHEM17 citations84
US7678422B2Mar 16, 2010
Cyclic chemical vapor deposition of metal-silicon containing films
AIR PROD & CHEM12 citations83
US6770254B2Aug 3, 2004
Purification of group IVb metal halides
AIR PROD & CHEM2 citations62
US8039658B2Oct 18, 2011
Removal of trace arsenic impurities from triethylphosphate (TEPO)
AIR PROD & CHEM2 citations60
US9627193B2Apr 18, 2017
Organoaminodisilane precursors and methods for depositing films comprising same
AIR PROD & CHEM0 citations52
US7727401B2Jun 1, 2010
Selective purification of mono-terpenes for removal of oxygen containing species
AIR PROD & CHEM0 citations51
US7442822B2Oct 28, 2008
Stabilization of nitrogen-containing and oxygen-containing organosilanes using weakly basic ion-exchange resins
AIR PROD & CHEM0 citations45
XIAO MANCHAO
3 patentsUS8912353B2Dec 16, 2014
Organoaminosilane precursors and methods for depositing films comprising same
XIAO MANCHAO22 citations92
US8530361B2Sep 10, 2013
Process for producing silicon and oxide films from organoaminosilane precursors
XIAO MANCHAO20 citations92
US8460753B2Jun 11, 2013
Methods for depositing silicon dioxide or silicon oxide films using aminovinylsilanes
XIAO MANCHAO24 citations92