Inventor
CHOI Jong
US4 patents
Patents
4 patentsUS10475655B2Nov 12, 2019
Selective deposition of metal silicides
APPLIED MATERIALS INC2 citations70
US11993845B2May 28, 2024
High selectivity atomic layer deposition process
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US10586707B2Mar 10, 2020
Selective deposition of metal silicides
APPLIED MATERIALS INC0 citations49
US11664215B2May 30, 2023
High selectivity atomic later deposition process
APPLIED MATERIALS INC0 citations48