Inventor
AHLES CHRISTOPHER
US4 patents
Patents
4 patentsUS10475655B2Nov 12, 2019
Selective deposition of metal silicides
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High selectivity atomic layer deposition process
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US10586707B2Mar 10, 2020
Selective deposition of metal silicides
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US11664215B2May 30, 2023
High selectivity atomic later deposition process
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