Inventor
LOKTEV MIKHAIL YURIEVICH
NL4 patents
Patents
4 patentsUS11550232B2Jan 10, 2023
Lithographic systems and methods of operating the same
KULICKE & SOFFA LITEQ B V4 citations67
US11947271B2Apr 2, 2024
Lithographic systems and methods of operating the same
KULICKE & SOFFA LITEQ B V0 citations55
US11921435B2Mar 5, 2024
Lithographic systems and methods of operating the same
KULICKE & SOFFA LITEQ B V0 citations55
US11042095B2Jun 22, 2021
Optical beam homogenizer based on a lens array
KULICKE & SOFFA LITEQ B V0 citations42