Inventor
NG JOEL
US7 patents
⚠️ This page may combine multiple inventors who share the name “NG JOEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS10692705B2Jun 23, 2020
Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber
TOKYO ELECTRON LTD5 citations71
US12158374B2Dec 3, 2024
Time-resolved OES data collection
TOKYO ELECTRON LTD0 citations58
US12362158B2Jul 15, 2025
Method for OES data collection and endpoint detection
TOKYO ELECTRON LTD0 citations57
US12306044B2May 20, 2025
Optical emission spectroscopy for advanced process characterization
TOKYO ELECTRON LTD0 citations57
THERMA WAVE INC
3 patentsUS7154607B2Dec 26, 2006
Flat spectrum illumination source for optical metrology
THERMA WAVE INC8 citations70
US7027158B2Apr 11, 2006
Beam splitter/combiner for optical meterology tool
THERMA WAVE INC6 citations70
US7251036B2Jul 31, 2007
Beam splitter/combiner for optical metrology tool
THERMA WAVE INC4 citations59