Inventor

HUANG CHUNG-HO

US32 patents

⚠️ This page may combine multiple inventors who share the name “HUANG CHUNG-HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUANG CHUNG-HO

LAM RES CORP

Plug and play sensor integration for a process module

Integrated stepwise statistical process control in a plasma processing system

Integrated full wavelength spectrometer for wafer processing

Integrated electronic hardware for wafer processing control and diagnostic

Recipe-and-component control module and methods thereof

Etch endpoint detection

Targeted data collection architecture

Processing information management system in a plasma processing tool

Component-tracking system and methods therefor

Mobile connectivity and control of semiconductor manufacturing equipment

Architecture for general purpose programmable semiconductor processing system and methods therefor

Cluster tools for processing substrates using at least a key file

Integrated stepwise statistical process control in a plasma processing system

System and method for automating user interaction for semiconductor manufacturing equipment

Automatic dynamic baseline creation and adjustment

Model-based scheduling for substrate processing systems

Dynamic component-tracking system and methods therefor

Data capture and transformation to support data analysis and machine learning for substrate manufacturing systems

Control of semiconductor manufacturing equipment in mixed reality environments

Primary server architectural networking arrangement and methods therefor

Methods for configuring a plasma cluster tool

Methods and apparatus for configuring plasma cluster tools

Social network service for semiconductor manufacturing equipment and users

Software emulator for hardware components in a gas delivery system of substrate processing system

Methods and arrangement for creating recipes using best-known methods

Recipe report card framework and methods thereof

Method, apparatus, and system for establishing a virtual tether between a mobile device and a semiconductor processing tool

HUANG CHUNG-HO

Methods and apparatus for integrating and controlling a plasma processing system

Methods for performing data management for a recipe-and-component control module

WONG SCOTT

Dynamic alignment of wafers using compensation values obtained through a series of wafer movements

NI TUQIANG

Plasma processing method and apparatus with control of plasma excitation power

HUANG CHUNG HO

Arrangement for identifying uncontrolled events at the process module level and methods thereof