Inventor
FAN SHIH-JEUN
US5 patents
Patents
5 patentsUS7565220B2Jul 21, 2009
Targeted data collection architecture
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US7536538B1May 19, 2009
Cluster tools for processing substrates using at least a key file
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Methods for configuring a plasma cluster tool
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US7162317B2Jan 9, 2007
Methods and apparatus for configuring plasma cluster tools
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US7542820B2Jun 2, 2009
Methods and arrangement for creating recipes using best-known methods
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