Inventor

MATSUI SHOWGO

JP3 patents

Patents

3 patents

US6064484AMay 16, 2000

Pattern inspection method and system

FUJITSU LTD40 citations89

US4673816AJun 16, 1987

Method for inspecting a pattern and an apparatus for inspecting a pattern

FUJITSU LTD14 citations71

US6598185B1Jul 22, 2003

Pattern data inspection method and storage medium

FUJITSU LTD2 citations55