Inventor
CHIN CHIH-CHENG
TW9 patents
⚠️ This page may combine multiple inventors who share the name “CHIN CHIH-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
8 patentsUS6982135B2Jan 3, 2006
Pattern compensation for stitching
TAIWAN SEMICONDUCTOR MFG54 citations95
US7383530B2Jun 3, 2008
System and method for examining mask pattern fidelity
TAIWAN SEMICONDUCTOR MFG27 citations92
US7312021B2Dec 25, 2007
Holographic reticle and patterning method
TAIWAN SEMICONDUCTOR MFG3 citations62
US7005219B2Feb 28, 2006
Defect repair method employing non-defective pattern overlay and photoexposure
TAIWAN SEMICONDUCTOR MFG2 citations61
US7722997B2May 25, 2010
Holographic reticle and patterning method
TAIWAN SEMICONDUCTOR MFG0 citations52
US7697114B2Apr 13, 2010
Method and apparatus for compensated illumination for advanced lithography
TAIWAN SEMICONDUCTOR MFG1 citations52
US7316872B2Jan 8, 2008
Etching bias reduction
TAIWAN SEMICONDUCTOR MFG0 citations52
US6653029B2Nov 25, 2003
Dual-focused ion beams for semiconductor image scanning and mask repair
TAIWAN SEMICONDUCTOR MFG1 citations50