Inventor

HSIEH HUNG CHANG

TW84 patents

⚠️ This page may combine multiple inventors who share the name “HSIEH HUNG CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HSIEH HUNG CHANG

TAIWAN SEMICONDUCTOR MFG

System and method for lithography alignment

Method of making a FinFET device

Dual damascene approach for small geometry dimension

Method of patterning narrow gate electrode

Method of semiconductor integrated circuit fabrication

Method of making a FinFET device

Dual damascene method employing sacrificial via fill layer

Photoresist development method employing multiple photoresist developer rinse

Method for placing identifying mark on semiconductor wafer

Method of in line intra-field correction of overlay alignment

System and method for examining mask pattern fidelity

Deep-submicron integrated circuit package for improving bondability

Method for improving bondability for deep-submicron integrated circuit package

Method of forming a hole in the sub quarter micron range

Method and apparatus for placing identifying mark on semiconductor wafer

Pad alignment for AlCu pad for copper process

Method of overlay prediction

Test structure placement on a semiconductor wafer

Method and apparatus for drying a wafer

Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask

TAIWAN SEMICONDUCTOR MFG CO LTD

Method of forming a photoresist layer

Semiconductor method with wafer edge modification

Lithography system with an embedded cleaning module

Method of making a FinFET device

Method of forming source/drain contact

Method of making a FinFET device

Method of semiconductor integrated circuit fabrication

Method for integrated circuit patterning

Method of making a FinFET device

Method of forming source/drain contact

Lithography alignment marks

Two-dimensional process window improvement

Method of lithography process with inserting scattering bars

Method of making a FinFET device

Method of semiconductor integrated circuit fabrication

Lithography system with an embedded cleaning module

Structure for chip extension

DELTA ELECTRONICS INC

Assembled structure of power semiconductor device and heat sink

Heat-dispersing module of electronic device

Heat-dissipating fan module of electronic apparatus

Electrical connector having latching mechanism

Electrical connector having latching mechanism

Composite connector assembly and power supply apparatus having such composite connector assembly

CHANG CHUN-WEI

Method of forming a photoresist layer

WANG CHIH-CHIEN

Metal grid in backside illumination image sensor chips and methods for forming the same

LAN SHUN-WEI

Planarization method for high wafer topography

YU VINVENT

Exposure apparatus and method for photolithography process

YU VINCENT

Double patterning method using metallic compound mask layer

LEE HSIN-CHANG

Method of making a lithography mask

HUANG WEI-CHIEH

Method and apparatus for drying a wafer