Inventor
TOMINAGA SHOTA
US4 patents
Patents
4 patentsUS11328947B1May 10, 2022
Aligner apparatus and alignment method
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US12398000B2Aug 26, 2025
Substrate conveying robot system
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US12162145B2Dec 10, 2024
Substrate conveying robot and substrate conveying robot system
KAWASAKI HEAVY IND LTD0 citations48
US11330725B2May 10, 2022
Housing
KAWASAKI HEAVY IND LTD0 citations47