Inventor

SHIGAKI KEISUKE

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SHIGAKI KEISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US4812201AMar 14, 1989

Method of ashing layers, and apparatus for ashing layers

TOKYO ELECTRON LTD481 citations96

US5028955AJul 2, 1991

Exposure apparatus

TOKYO ELECTRON LTD36 citations92

NIPPON ELECTRIC CO

1 patent

US4455609AJun 19, 1984

Apparatus for realtime fast reconstruction and display of dose distribution

NIPPON ELECTRIC CO154 citations93