P
PatentIndex
Search
Landscape
Sign in
Inventor
PANT ANIL
US
2 patents
Patents
2 patents
US6336845B1
Jan 8, 2002
Method and apparatus for polishing semiconductor wafers
LAM RES CORP
45 citations
94
US6132289A
Oct 17, 2000
Apparatus and method for film thickness measurement integrated into a wafer load/unload unit
LAM RES CORP
101 citations
94