Inventor

WALK HEINRICH

DE10 patents

⚠️ This page may combine multiple inventors who share the name “WALK HEINRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG RTP SYSTEMS GMBH

2 patents

US6614005B1Sep 2, 2003

Device and method for thermally treating substrates

STEAG RTP SYSTEMS GMBH36 citations90

US6316747B1Nov 13, 2001

Apparatus for the thermal treatment of substrates

STEAG RTP SYSTEMS GMBH12 citations72

STEAG AST

2 patents

US6369363B2Apr 9, 2002

Method of measuring electromagnetic radiation

STEAG AST30 citations90

US5965047AOct 12, 1999

Rapid thermal processing (RTP) system with rotating substrate

STEAG AST51 citations88

AST ELEKRONIK GMBH

1 patent

US5628564AMay 13, 1997

Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems

AST ELEKRONIK GMBH98 citations94

STEAG AST GMBH

1 patent

US5841110ANov 24, 1998

Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems

STEAG AST GMBH84 citations93

AST ELEKTRONIK GMBH

1 patent

US5359693AOct 25, 1994

Method and apparatus for a rapid thermal processing of delicate components

AST ELEKTRONIK GMBH61 citations92

STEAG AST ELEKTRONIK GMBH

1 patent

US6191392B1Feb 20, 2001

Method of measuring electromagnetic radiation

STEAG AST ELEKTRONIK GMBH35 citations88

TORQEEDO GMBH

1 patent

US7614925B2Nov 10, 2009

Transportable outboard motor

TORQEEDO GMBH8 citations83

RAMPF FORMEN GMBH

1 patent

US7853337B2Dec 14, 2010

Device for monitoring and controlling a machine

RAMPF FORMEN GMBH0 citations33