Inventor
DIMEO JR FRANK
US18 patents
⚠️ This page may combine multiple inventors who share the name “DIMEO JR FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
11 patentsUS5972430AOct 26, 1999
Digital chemical vapor deposition (CVD) method for forming a multi-component oxide layer
ADVANCED TECH MATERIALS417 citations99
US7475588B2Jan 13, 2009
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS474 citations98
US7296460B2Nov 20, 2007
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS481 citations98
US7080545B2Jul 25, 2006
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS495 citations98
US6596236B2Jul 22, 2003
Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
ADVANCED TECH MATERIALS129 citations98
US6143191ANov 7, 2000
Method for etch fabrication of iridium-based electrode structures
ADVANCED TECH MATERIALS79 citations96
US7966879B2Jun 28, 2011
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
ADVANCED TECH MATERIALS25 citations92
US7296458B2Nov 20, 2007
Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same
ADVANCED TECH MATERIALS21 citations92
US7228724B2Jun 12, 2007
Apparatus and process for sensing target gas species in semiconductor processing systems
ADVANCED TECH MATERIALS19 citations92
US7862646B2Jan 4, 2011
Nanoporous articles and methods of making same
ADVANCED TECH MATERIALS20 citations91
US7819981B2Oct 26, 2010
Methods for cleaning ion implanter components
ADVANCED TECH MATERIALS16 citations83