Inventor
MATSUSHITA SHOHEI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MATSUSHITA SHOHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
D2S INC
3 patentsUS7579606B2Aug 25, 2009
Method and system for logic design for cell projection particle beam lithography
D2S INC19 citations92
US7747977B1Jun 29, 2010
Method and system for stencil design for particle beam writing
D2S INC19 citations90
US7772575B2Aug 10, 2010
Stencil design and method for cell projection particle beam lithography
D2S INC10 citations84