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Inventor
WANG MINGCHING
CN
2 patents
Patents
2 patents
US7928000B2
Apr 19, 2011
Method for forming self aligned contacts for integrated circuit devices
SEMICONDUCTOR MFG INT SHANGHAI
2 citations
53
US7132368B2
Nov 7, 2006
Method for repairing plasma damage after spacer formation for integrated circuit devices
SEMICONDUCTOR MFG INT SHANGHAI
0 citations
26