Inventor
SMARGIASSI EUGENE
US20 patents
⚠️ This page may combine multiple inventors who share the name “SMARGIASSI EUGENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
8 patentsUS7935940B1May 3, 2011
Measuring in-situ UV intensity in UV cure tool
NOVELLUS SYSTEMS INC577 citations98
US8734663B2May 27, 2014
Purging of porogen from UV cure chamber
NOVELLUS SYSTEMS INC19 citations92
US10121682B2Nov 6, 2018
Purging of porogen from UV cure chamber
NOVELLUS SYSTEMS INC5 citations83
US9384959B2Jul 5, 2016
Purging of porogen from UV cure chamber
NOVELLUS SYSTEMS INC7 citations83
US9073100B2Jul 7, 2015
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
NOVELLUS SYSTEMS INC8 citations82
US9873946B2Jan 23, 2018
Multi-station sequential curing of dielectric films
NOVELLUS SYSTEMS INC3 citations72
US10020197B2Jul 10, 2018
Method for reducing porogen accumulation from a UV-cure chamber
NOVELLUS SYSTEMS INC2 citations71
US11177131B2Nov 16, 2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
NOVELLUS SYSTEMS INC0 citations59
APPLIED MATERIALS INC
4 patentsUS6231716B1May 15, 2001
Processing chamber with rapid wafer exchange
APPLIED MATERIALS INC92 citations96
US6515261B1Feb 4, 2003
Enhanced lift pin
APPLIED MATERIALS INC26 citations92
US6535628B2Mar 18, 2003
Detection of wafer fragments in a wafer processing apparatus
APPLIED MATERIALS INC70 citations91
US6807972B2Oct 26, 2004
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber
APPLIED MATERIALS INC13 citations83