Inventor
KOYAMA SHIRO
JP5 patents
Patents
5 patentsUS5665167ASep 9, 1997
Plasma treatment apparatus having a workpiece-side electrode grounding circuit
TOKYO ELECTRON LTD134 citations97
US5625526AApr 29, 1997
Electrostatic chuck
TOKYO ELECTRON LTD193 citations97
US5320704AJun 14, 1994
Plasma etching apparatus
TOKYO ELECTRON LTD23 citations92
US5236556AAug 17, 1993
Plasma apparatus
TOKYO ELECTRON LTD9 citations73
US5474643ADec 12, 1995
Plasma processing apparatus
TOKYO ELECTRON LTD10 citations71