P

Inventor

TAMAGAWA KOKI

JP11 patents
⚠️ This page may combine multiple inventors who share the name “TAMAGAWA KOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINKO ELECTRIC IND CO

3 patents
US8023248B2Sep 20, 2011

Electrostatic chuck

SHINKO ELECTRIC IND CO155 citations98
US9252039B2Feb 2, 2016

Electrostatic chuck apparatus

SHINKO ELECTRIC IND CO2 citations60
US9837297B2Dec 5, 2017

Tray and wafer holding apparatus

SHINKO ELECTRIC IND CO0 citations50

KOYAMA TOMOAKI

2 patents
US8199454B2Jun 12, 2012

Electrostatic chuck and substrate temperature adjusting-fixing device

KOYAMA TOMOAKI82 citations91
US8068326B2Nov 29, 2011

Electrostatic chuck and substrate temperature control fixing apparatus

KOYAMA TOMOAKI0 citations45

FUJITSU LTD

1 patent
US5777838AJul 7, 1998

Electrostatic chuck and method of attracting wafer

FUJITSU LTD611 citations96

YOSHIKAWA TADAYOSHI

1 patent
US8441772B2May 14, 2013

Substrate for electrostatic chuck and electrostatic chuck

YOSHIKAWA TADAYOSHI44 citations90

SAITO MIKI

1 patent
US8505928B2Aug 13, 2013

Substrate temperature control fixing apparatus

SAITO MIKI8 citations76

NIPPON TUNGSTEN

1 patent
US9120704B2Sep 1, 2015

Dielectric layer for electrostatic chuck and electrostatic chuck

NIPPON TUNGSTEN2 citations58

FURUMURA YUJI

1 patent
US8686743B2Apr 1, 2014

Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus

FURUMURA YUJI0 citations51

YONEKURA HIROSHI

1 patent
US8641825B2Feb 4, 2014

Substrate temperature regulation fixed apparatus

YONEKURA HIROSHI1 citations48