Inventor
VEZIN VINCENT
JP5 patents
⚠️ This page may combine multiple inventors who share the name “VEZIN VINCENT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS6548112B1Apr 15, 2003
Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamber
TOKYO ELECTRON LTD76 citations97
US6893953B2May 17, 2005
Fabrication process of a semiconductor device including a CVD process of a metal film
TOKYO ELECTRON LTD16 citations82
US7323220B2Jan 29, 2008
Gas phase growth system, method of operating the system, and vaporizer for the system
TOKYO ELECTRON LTD3 citations61
US7476619B2Jan 13, 2009
Semiconductor device
TOKYO ELECTRON LTD1 citations47