Inventor

CHESHIRE ALAN

GB3 patents

⚠️ This page may combine multiple inventors who share the name “CHESHIRE ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHESHIRE ALAN

2 patents

US8937017B2Jan 20, 2015

Method and apparatus for etching

CHESHIRE ALAN101 citations92

US8298959B2Oct 30, 2012

Method and apparatus for etching

CHESHIRE ALAN103 citations92

CHEBI ROBERT P

1 patent

US9318341B2Apr 19, 2016

Methods for etching a substrate

CHEBI ROBERT P2 citations51