Inventor
JAGANATHAN BALASUBRAMANIAM COIMBATORE
IN4 patents
Patents
4 patentsUS11705354B2Jul 18, 2023
Substrate handling systems
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US11289347B2Mar 29, 2022
Non-contact clean module
APPLIED MATERIALS INC2 citations68
US11721563B2Aug 8, 2023
Non-contact clean module
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US12392427B2Aug 19, 2025
Insulated fluid lines in chemical mechanical polishing
APPLIED MATERIALS INC0 citations50