Inventor

DOMIN JONATHAN P

US3 patents

Patents

3 patents

US11289347B2Mar 29, 2022

Non-contact clean module

APPLIED MATERIALS INC2 citations68

US11721563B2Aug 8, 2023

Non-contact clean module

APPLIED MATERIALS INC0 citations57

US11833637B2Dec 5, 2023

Control of steam generation for chemical mechanical polishing

APPLIED MATERIALS INC0 citations48