Inventor
LI AN-CHI
TW6 patents
Patents
6 patentsUS11615946B2Mar 28, 2023
Baffle plate for controlling wafer uniformity and methods for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10529578B2Jan 7, 2020
Method of fabricating semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations69
US12463016B2Nov 4, 2025
Devices and methods for controlling wafer uniformity in plasma-based process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12412734B2Sep 9, 2025
Baffle plate for controlling wafer uniformity and methods for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11769652B2Sep 26, 2023
Devices and methods for controlling wafer uniformity in plasma-based process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10964547B2Mar 30, 2021
Method of fabricating semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59