Inventor

SIEVERS DANE

US2 patents

Patents

2 patents

US12523933B2Jan 13, 2026

Photoresist-free photolithography, photoprocessing tools, and methods with VUV or deep-UV lamps

UNIV ILLINOIS0 citations56

US12011736B2Jun 18, 2024

Methods and systems for large area and low defect monolayer ordering of microspheres and nanospheres

UNIV ILLINOIS0 citations33