Inventor

LUONG VINH

US5 patents

⚠️ This page may combine multiple inventors who share the name “LUONG VINH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US10260150B2Apr 16, 2019

Method and system for sculpting spacer sidewall mask

TOKYO ELECTRON LTD2 citations70

US9899219B2Feb 20, 2018

Trimming inorganic resists with selected etchant gas mixture and modulation of operating variables

TOKYO ELECTRON LTD5 citations70

US10672618B2Jun 2, 2020

Systems and methods for patterning features in tantalum nitride (TaN) layer

TOKYO ELECTRON LTD2 citations69

US9978563B2May 22, 2018

Plasma treatment method to meet line edge roughness and other integration objectives

TOKYO ELECTRON LTD0 citations39

LUONG VINH

1 patent

US8313661B2Nov 20, 2012

Deep trench liner removal process

LUONG VINH0 citations42