Inventor
CARROLL ALLEN
US5 patents
⚠️ This page may combine multiple inventors who share the name “CARROLL ALLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS8893059B2Nov 18, 2014
Pattern data system for high-performance maskless electron beam lithography
KLA TENCOR CORP12 citations80
US8373144B1Feb 12, 2013
Quasi-annular reflective electron patterning device
KLA TENCOR CORP5 citations72
US9214344B1Dec 15, 2015
Pillar-supported array of micro electron lenses
KLA TENCOR CORP4 citations70
US9081287B2Jul 14, 2015
Methods of measuring overlay errors in area-imaging e-beam lithography
KLA TENCOR CORP1 citations50