Inventor

TURNER PAUL JONATHAN

NL2 patents

Patents

2 patents

US12124174B2Oct 22, 2024

Metrology method and apparatus, computer program and lithographic system

ASML NETHERLANDS BV0 citations55

US10955744B2Mar 23, 2021

Method of determining a parameter of a pattern transfer process, device manufacturing method

ASML NETHERLANDS BV1 citations55