Inventor
HIROSHIRO KOUKICHI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “HIROSHIRO KOUKICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS11306249B2Apr 19, 2022
Substrate processing method, substrate processing device and etching liquid
TOKYO ELECTRON LTD2 citations70
US12506012B2Dec 23, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US12203021B2Jan 21, 2025
Substrate processing device and etching liquid
TOKYO ELECTRON LTD0 citations60
US11049723B2Jun 29, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD1 citations59
US8015984B2Sep 13, 2011
Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent
TOKYO ELECTRON LTD1 citations52
US11723259B2Aug 8, 2023
Substrate processing apparatus and method of processing substrate
TOKYO ELECTRON LTD0 citations51
US9415356B1Aug 16, 2016
Chemical-liquid mixing method and chemical-liquid mixing apparatus
TOKYO ELECTRON LTD0 citations51
US9339775B2May 17, 2016
Chemical-liquid mixing method and chemical-liquid mixing apparatus
TOKYO ELECTRON LTD0 citations51
US7998306B2Aug 16, 2011
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations41
HIROSHIRO KOUKICHI
4 patentsUS8701308B2Apr 22, 2014
Fluid heater, manufacturing method thereof, substrate processing apparatus including fluid heater, and substrate processing method
HIROSHIRO KOUKICHI14 citations82
US8468943B2Jun 25, 2013
Imprint method, computer storage medium and imprint apparatus
HIROSHIRO KOUKICHI6 citations71
US8303724B2Nov 6, 2012
Substrate processing method and non-transitory storage medium for carrying out such method
HIROSHIRO KOUKICHI2 citations61
US8522712B2Sep 3, 2013
Template treatment method, program, computer storage medium, template treatment apparatus and imprint system
HIROSHIRO KOUKICHI0 citations50