Inventor

TERADA SHOICHI

JP13 patents

⚠️ This page may combine multiple inventors who share the name “TERADA SHOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US10347482B2Jul 9, 2019

Substrate processing apparatus, substrate processing method, and storage medium with program stored therein for executing substrate processing method

TOKYO ELECTRON LTD0 citations51

US9744551B2Aug 29, 2017

Coating apparatus and nozzle

TOKYO ELECTRON LTD0 citations41

US10591823B2Mar 17, 2020

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations40

HIROSHIRO KOUKICHI

2 patents

US8468943B2Jun 25, 2013

Imprint method, computer storage medium and imprint apparatus

HIROSHIRO KOUKICHI6 citations71

US8522712B2Sep 3, 2013

Template treatment method, program, computer storage medium, template treatment apparatus and imprint system

HIROSHIRO KOUKICHI0 citations50

TOKYO OHKA KOGYO CO LTD

2 patents

US11441101B2Sep 13, 2022

Cleaning composition, cleaning method, and method for manufacturing semiconductor

TOKYO OHKA KOGYO CO LTD1 citations62

US11355362B2Jun 7, 2022

Washing method, washing device, storage medium, and washing composition

TOKYO OHKA KOGYO CO LTD1 citations62

USHIO ELECTRIC INC

2 patents

US7649319B2Jan 19, 2010

Ultra-high pressure mercury lamp

USHIO ELECTRIC INC2 citations60

US10237959B2Mar 19, 2019

Discharge lamp lighting device

USHIO ELECTRIC INC0 citations38

TERADA SHOICHI

2 patents

US8888920B2Nov 18, 2014

Imprint system, imprint method, and non-transitory computer storage medium

TERADA SHOICHI3 citations59

US8840728B2Sep 23, 2014

Imprint system for performing a treatment on a template

TERADA SHOICHI2 citations59

SEIKO EPSON CORP

1 patent

US6563082B2May 13, 2003

Laser cutting method, laser cutting apparatus, and method and apparatus for manufacturing liquid crystal device

SEIKO EPSON CORP77 citations96

GOTO KAZUHIRO

1 patent

US8410697B2Apr 2, 2013

Light source device

GOTO KAZUHIRO0 citations40