P
PatentIndex
Search
Landscape
Sign in
Inventor
MCGRATH PETER GERARD
US
2 patents
Patents
2 patents
US6972840B1
Dec 6, 2005
Method of reducing process plasma damage using optical spectroscopy
LSI LOGIC CORP
82 citations
95
US6673200B1
Jan 6, 2004
Method of reducing process plasma damage using optical spectroscopy
LSI LOGIC CORP
101 citations
95