Inventor
FUJIMOTO RYAN TADASHI
US3 patents
Patents
3 patentsUS6972840B1Dec 6, 2005
Method of reducing process plasma damage using optical spectroscopy
LSI LOGIC CORP82 citations95
US6673200B1Jan 6, 2004
Method of reducing process plasma damage using optical spectroscopy
LSI LOGIC CORP101 citations95
US6806038B2Oct 19, 2004
Plasma passivation
LSI LOGIC CORP16 citations83