Inventor
FULTON DAKIN
US4 patents
Patents
4 patentsUS6806186B2Oct 19, 2004
Submicron metallization using electrochemical deposition
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US6592736B2Jul 15, 2003
Methods and apparatus for controlling an amount of a chemical constituent of an electrochemical bath
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US7144805B2Dec 5, 2006
Method of submicron metallization using electrochemical deposition of recesses including a first deposition at a first current density and a second deposition at an increased current density
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US6814855B2Nov 9, 2004
Automated chemical management system having improved analysis unit
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