Inventor
MIYAO HIROFUMI
JP4 patents
Patents
4 patentsUS6653629B2Nov 25, 2003
Specimen inspection instrument
JEOL LTD5 citations57
US7351970B2Apr 1, 2008
Scanning electron microscope
JEOL LTD2 citations55
US12222658B2Feb 11, 2025
Stage apparatus and electron beam lithography system
JEOL LTD0 citations48
US7531794B2May 12, 2009
Method and apparatus for preparing specimen
JEOL LTD0 citations42