Inventor
ROGERS JAMES H
US20 patents
⚠️ This page may combine multiple inventors who share the name “ROGERS JAMES H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEVAC INC
4 patentsUS6228429B1May 8, 2001
Methods and apparatus for processing insulating substrates
INTEVAC INC21 citations92
US6203862B1Mar 20, 2001
Processing systems with dual ion sources
INTEVAC INC30 citations92
US6101972AAug 15, 2000
Plasma processing system and method
INTEVAC INC32 citations92
US7000418B2Feb 21, 2006
Capacitance sensing for substrate cooling
INTEVAC INC5 citations63
LAM RES CORP
3 patentsUS7713379B2May 11, 2010
Plasma confinement rings including RF absorbing material for reducing polymer deposition
LAM RES CORP20 citations92
US7430986B2Oct 7, 2008
Plasma confinement ring assemblies having reduced polymer deposition characteristics
LAM RES CORP28 citations92
US9123650B2Sep 1, 2015
Plasma confinement rings including RF absorbing material for reducing polymer deposition
LAM RES CORP1 citations62
DHINDSA RAJINDER
3 patentsUS8262922B2Sep 11, 2012
Plasma confinement rings having reduced polymer deposition characteristics
DHINDSA RAJINDER8 citations84
US8290717B2Oct 16, 2012
Methods and apparatus for wafer area pressure control in an adjustable gap plasma chamber
DHINDSA RAJINDER4 citations63
US8500952B2Aug 6, 2013
Plasma confinement rings having reduced polymer deposition characteristics
DHINDSA RAJINDER4 citations62