Inventor
MICHAELSON TIMOTHY
US10 patents
⚠️ This page may combine multiple inventors who share the name “MICHAELSON TIMOTHY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS9632411B2Apr 25, 2017
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
APPLIED MATERIALS INC26 citations93
US10322491B2Jun 18, 2019
Printed chemical mechanical polishing pad
APPLIED MATERIALS INC17 citations85
US9716012B2Jul 25, 2017
Methods of selective layer deposition
APPLIED MATERIALS INC15 citations84
US9411237B2Aug 9, 2016
Resist hardening and development processes for semiconductor device manufacturing
APPLIED MATERIALS INC11 citations84
US9829805B2Nov 28, 2017
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
APPLIED MATERIALS INC14 citations83
US9354508B2May 31, 2016
Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor
APPLIED MATERIALS INC5 citations83
US10209613B2Feb 19, 2019
System and method for manufacturing planarized extreme ultraviolet lithography blank
APPLIED MATERIALS INC2 citations72
US9236467B2Jan 12, 2016
Atomic layer deposition of hafnium or zirconium alloy films
APPLIED MATERIALS INC1 citations52