Inventor

YABU NOBUHIKO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “YABU NOBUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

2 patents

US9891525B2Feb 13, 2018

Exposure method, exposure apparatus, and article manufacturing method

CANON KK3 citations67

US7961295B2Jun 14, 2011

Exposure apparatus, measurement method, stabilization method, and device fabrication method

CANON KK3 citations57

YABU NOBUHIKO

2 patents

US8625069B2Jan 7, 2014

Exposure apparatus and method of manufacturing device

YABU NOBUHIKO1 citations45

US9229312B2Jan 5, 2016

Exposure apparatus, measurement method, stabilization method, and device fabrication method

YABU NOBUHIKO0 citations42

KITAMURA TSUYOSHI

1 patent

US8163467B2Apr 24, 2012

Dummy light-exposed substrate, method of manufacturing the same, immersion exposure apparatus, and device manufacturing method

KITAMURA TSUYOSHI0 citations47