Inventor

HSIA SHAW-TSENG

TW2 patents

Patents

2 patents

US5510296AApr 23, 1996

Manufacturable process for tungsten polycide contacts using amorphous silicon

VANGUARD INT SEMICONDUCT CORP24 citations88

US5838051ANov 17, 1998

Tungsten policide contacts for semiconductor devices

VANGUARD INT SEMICONDUCT CORP10 citations69