Inventor

MATHUR SANJEEV

US3 patents

⚠️ This page may combine multiple inventors who share the name “MATHUR SANJEEV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AUGUST TECHNOLOGY CORP

2 patents

US7024031B1Apr 4, 2006

System and method for inspection using off-angle lighting

AUGUST TECHNOLOGY CORP20 citations86

US7019841B2Mar 28, 2006

System and method for inspecting a component using interferometry

AUGUST TECHNOLOGY CORP13 citations78

RUDOLPH TECHNOLOGIES INC

1 patent

US7158235B2Jan 2, 2007

System and method for inspection using white light interferometry

RUDOLPH TECHNOLOGIES INC4 citations59