Inventor

MACKENZIE KEN

US3 patents

⚠️ This page may combine multiple inventors who share the name “MACKENZIE KEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PLASMA THERM LLC

2 patents

US9082839B2Jul 14, 2015

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC3 citations58

US9202737B2Dec 1, 2015

Method and apparatus for plasma dicing a semi-conductor wafer

PLASMA THERM LLC0 citations48

LAI SHOULIANG

1 patent

US7829465B2Nov 9, 2010

Method for plasma etching of positively sloped structures

LAI SHOULIANG3 citations57