Inventor
LAZERAND THIERRY
US3 patents
Patents
3 patentsUS9343365B2May 17, 2016
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC2 citations61
US9082839B2Jul 14, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC3 citations58
US9202737B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations48