Inventor

PUYT MICHIEL

NL3 patents

⚠️ This page may combine multiple inventors who share the name “PUYT MICHIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7791708B2Sep 7, 2010

Lithographic apparatus, substrate table, and method for enhancing substrate release properties

ASML NETHERLANDS BV5 citations55

US7508494B2Mar 24, 2009

Lithographic apparatus and a subtrate table for exciting a shockwave in a substrate

ASML NETHERLANDS BV0 citations40

PUYT MICHIEL

1 patent

US8792085B2Jul 29, 2014

Lithographic apparatus, substrate table, and method for enhancing substrate release properties

PUYT MICHIEL8 citations76