Inventor
COMPEN RENE THEODORUS PETRUS
NL17 patents
⚠️ This page may combine multiple inventors who share the name “COMPEN RENE THEODORUS PETRUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS7385670B2Jun 10, 2008
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus
ASML NETHERLANDS BV64 citations97
US7050147B2May 23, 2006
Method of adjusting a height of protrusions on a support surface of a support table, a lithographic projection apparatus, and a support table for supporting an article in a lithographic apparatus
ASML NETHERLANDS BV23 citations92
US8384882B2Feb 26, 2013
Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate
ASML NETHERLANDS BV4 citations61
US7978308B2Jul 12, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57
US7791708B2Sep 7, 2010
Lithographic apparatus, substrate table, and method for enhancing substrate release properties
ASML NETHERLANDS BV5 citations55
US7639345B2Dec 29, 2009
Lithographic apparatus
ASML NETHERLANDS BV0 citations48
ALBERTI JOZEF AUGUSTINUS MARIA
4 patentsUS8149387B2Apr 3, 2012
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus
ALBERTI JOZEF AUGUSTINUS MARIA8 citations79
US8086348B2Dec 27, 2011
Method of transferring a substrate, transfer system and lithographic projection apparatus
ALBERTI JOZEF AUGUSTINUS MARIA7 citations79
US8154709B2Apr 10, 2012
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus
ALBERTI JOZEF AUGUSTINUS MARIA0 citations47
US8064045B2Nov 22, 2011
Method of transferring a substrate, transfer system and lithographic projection apparatus
ALBERTI JOZEF AUGUSTINUS MARIA0 citations37
COMPEN RENE THEODORUS PETRUS
3 patentsUS9013682B2Apr 21, 2015
Clamping device and object loading method
COMPEN RENE THEODORUS PETRUS5 citations71
US9019476B2Apr 28, 2015
Lithographic apparatus and device manufacturing method
COMPEN RENE THEODORUS PETRUS4 citations65
US8902399B2Dec 2, 2014
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus
COMPEN RENE THEODORUS PETRUS1 citations50