Inventor
POOLE JOHN E
8 patents
⚠️ This page may combine multiple inventors who share the name “POOLE JOHN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSOH SMD INC
5 patentsUS7063773B2Jun 20, 2006
High purity sputter targets with target end-of-life indication and method of manufacture
TOSOH SMD INC26 citations92
US7922881B2Apr 12, 2011
Sputtering target with an insulating ring and a gap between the ring and the target
TOSOH SMD INC9 citations82
US4783379ANov 8, 1988
Explosive crystallization in metal/silicon multilayer film
TOSOH SMD INC21 citations80
US7087142B2Aug 8, 2006
Method for determining a critical size of an inclusion in aluminum or aluminum alloy sputtering target
TOSOH SMD INC3 citations61
US7712514B2May 11, 2010
Sputter targets and methods of manufacturing same to reduce particulate emission during sputtering
TOSOH SMD INC0 citations51