Inventor
PEARLSTEIN RONALD MARTIN
US38 patents
⚠️ This page may combine multiple inventors who share the name “PEARLSTEIN RONALD MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR PROD & CHEM
25 patentsUS8993072B2Mar 31, 2015
Halogenated organoaminosilane precursors and methods for depositing films comprising same
AIR PROD & CHEM285 citations98
US7357138B2Apr 15, 2008
Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials
AIR PROD & CHEM559 citations98
US7013916B1Mar 21, 2006
Sub-atmospheric gas delivery method and apparatus
AIR PROD & CHEM44 citations91
US10421766B2Sep 24, 2019
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
AIR PROD & CHEM5 citations84
US9460912B2Oct 4, 2016
High temperature atomic layer deposition of silicon oxide thin films
AIR PROD & CHEM9 citations84
US9200167B2Dec 1, 2015
Alkoxyaminosilane compounds and applications thereof
AIR PROD & CHEM10 citations84
US7563308B2Jul 21, 2009
Ionic liquid based mixtures for gas storage and delivery
AIR PROD & CHEM12 citations84
US7160359B2Jan 9, 2007
Built in purifier for reactive gases
AIR PROD & CHEM12 citations80
US6508948B2Jan 21, 2003
Cyanuric fluoride and related compounds for anisotropic etching
AIR PROD & CHEM13 citations77
US10242864B2Mar 26, 2019
High temperature atomic layer deposition of silicon oxide thin films
AIR PROD & CHEM4 citations73
US7303607B2Dec 4, 2007
Liquid media containing Lewis acidic reactive compounds for storage and delivery of Lewis basic gases
AIR PROD & CHEM8 citations73
US6814092B2Nov 9, 2004
Systems and methods for conditioning ultra high purity gas bulk containers
AIR PROD & CHEM6 citations72
US6616769B2Sep 9, 2003
Systems and methods for conditioning ultra high purity gas bulk containers
AIR PROD & CHEM10 citations72
US6277342B1Aug 21, 2001
Storage and safe delivery of hazardous specialty gases by acid/base reactions with ionic polymers
AIR PROD & CHEM13 citations71
US6557591B2May 6, 2003
Bulk gas built-in purifier with dual valve bulk container
AIR PROD & CHEM9 citations68
US10170297B2Jan 1, 2019
Compositions and methods using same for flowable oxide deposition
AIR PROD & CHEM1 citations62
US7648682B2Jan 19, 2010
Wick systems for complexed gas technology
AIR PROD & CHEM5 citations62
US10279959B2May 7, 2019
Alkoxysilylamine compounds and applications thereof
AIR PROD & CHEM0 citations52
US9627193B2Apr 18, 2017
Organoaminodisilane precursors and methods for depositing films comprising same
AIR PROD & CHEM0 citations52
US7282084B2Oct 16, 2007
Liquid media containing Lewis basic reactive compounds for storage and delivery of Lewis acidic gases
AIR PROD & CHEM0 citations51
US10319584B2Jun 11, 2019
Compositions and processes for depositing carbon-doped silicon-containing films
AIR PROD & CHEM0 citations49
US7736420B2Jun 15, 2010
Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom
AIR PROD & CHEM0 citations49
US9809711B2Nov 7, 2017
Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process
AIR PROD & CHEM0 citations42
US9677178B2Jun 13, 2017
Alkoxyaminosilane compounds and applications thereof
AIR PROD & CHEM0 citations42
US7264013B2Sep 4, 2007
Enhanced purge effect in gas conduit
AIR PROD & CHEM1 citations42
VERSUM MAT US LLC
7 patentsUS10899500B2Jan 26, 2021
Alkoxysilylamine compounds and applications thereof
VERSUM MAT US LLC5 citations73
US11725111B2Aug 15, 2023
Compositions and processes for depositing carbon-doped silicon-containing films
VERSUM MAT US LLC0 citations62
US11282710B2Mar 22, 2022
Selective deposition on silicon containing surfaces
VERSUM MAT US LLC1 citations62
US11142658B2Oct 12, 2021
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
VERSUM MAT US LLC0 citations62
US10991571B2Apr 27, 2021
High temperature atomic layer deposition of silicon oxide thin films
VERSUM MAT US LLC1 citations62
US12319637B2Jun 3, 2025
High purity ethylenediamine for semiconductor applications
VERSUM MAT US LLC0 citations57
US10077364B2Sep 18, 2018
Organoaminodisilane precursors and methods for depositing films comprising same
VERSUM MAT US LLC0 citations52
XIAO MANCHAO
3 patentsUS8771807B2Jul 8, 2014
Organoaminosilane precursors and methods for making and using same
XIAO MANCHAO453 citations98
US9005719B2Apr 14, 2015
Organoaminosilane precursors and methods for making and using same
XIAO MANCHAO12 citations83
US9447287B2Sep 20, 2016
Compositions and processes for depositing carbon-doped silicon-containing films
XIAO MANCHAO1 citations52